NANOMATERIALS AND
NANOMANUFACTURING CENTER ENGINEERING
Microelectronics Processing/clean room Laboratory
- Furnace quartzware/loading station hood
- SIC epitaxail growth chamber
- Plasma therm PT700
- SFI cluster sputter tool
(focused ion beam not yet in operation)
- SDI COCOS and SILC tools
- ATV furnace
- Critical point dryer
- Alphastep profilometer
- Long working microscope
- Afterglow system and research tool
- Mask Aligners
- Photoresist spinners
- Hard/softbake oven
- Two banks of furnace tubes
- Rudolph ellipsometer
- Spin rinse dryer
Metrology Laboratory
- Field emission scanning electron microscope
- EDAX scanning electron microscope
- Atomic force microscope
- Philips X-ray diffraction system
- Transmission electron microscope
(not yet in operation)
- Leitz inspection microscope
- Ultrasonic test systems
- Sopraspectroscopicellipsometer
- Hummer sputter tool, various material preparation
Support Nanocore Laboratories
- Surface science laboratory
- Device and test engineering laboratory
- Spectroscopy laboratory
- Laser processing and system integration laboratory
- Thin films deposition laboratory
